三甲基氟硅烷

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| ImageFile = Fluortrimethylsilan.svg
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| C=3 | H=9 | Si=1 | F=1
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| Density = 0.793 g·cm−3（0 °C）
| BoilingPt = 它和降冰片基锂反应，可以得到三甲基硅基降冰片烷。

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